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Home › Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework

Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework

US Patent 6532555 · Granted Mar 11, 2003

Estimated economic value: $2,325,000 ⓘ

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