Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework

Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework

US Patent 6725402 · Granted Apr 20, 2004

Estimated economic value: $2,632,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Parallel fault detection2013
Associating data with workpieces and correlating the data with yield data2012
Method and apparatus for correlating test equipment health and test results2010
Methods and systems for analyzing process equipment processing variations using 2010
Method and apparatus for matching test equipment calibration2010
Sidewall spacer pullback scheme2009
Initiating test runs based on fault detection results2009
Method to obtain uniform nitrogen profile in gate dielectrics2008
Method and apparatus for fault detection classification of multiple tools based 2008
Fault notification based on a severity level2007
Method of dynamically designing a preventative maintenance schedule based upon s2006
Automated material handling system for a manufacturing facility divided into sep2006