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Home › Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP)

Run-to-run control method for proportional-integral-derivative (PID) controller tuning for rapid thermal processing (RTP)

US Patent 6819963 · Granted Nov 16, 2004

Estimated economic value: $6,082,000 ⓘ

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