Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7888269 | Triple layer anti-reflective hard mask | Kouros Ghandehari, Hirokazu Tokuno, David Matsumoto, Christopher Foster, Weidong Qian +1 more | 2011-02-15 |
| 7307002 | Non-critical complementary masking method for poly-1 definition in flash memory device fabrication | Unsoon Kim, Hiroyuki Kinoshita, Yu Sun, Krishnashree Achuthan, Christopher Foster +2 more | 2007-12-11 |
| 7008301 | Polishing uniformity via pad conditioning | — | 2006-03-07 |
| 6540591 | Method and apparatus for post-polish thickness and uniformity control | Alexander J. Pasadyn, Anthony J. Toprac | 2003-04-01 |
| 6454899 | Apparatus for filling trenches | William J. Campbell, H. Jim Fulford, Craig W. Christian, Thomas J. Sonderman | 2002-09-24 |
| 6452180 | Infrared inspection for determining residual films on semiconductor devices | John L. Nistler | 2002-09-17 |
| 6444564 | Method and product for improved use of low k dielectric material among integrated circuit interconnect structures | — | 2002-09-03 |
| 6379216 | Rotary chemical-mechanical polishing apparatus employing multiple fluid-bearing platens for semiconductor fabrication | — | 2002-04-30 |
| 6331137 | Polishing pad having open area which varies with distance from initial pad surface | Kevin Shipley | 2001-12-18 |
| 6284622 | Method for filling trenches | William J. Campbell, H. Jim Fulford, Craig W. Christian, Thomas J. Sonderman | 2001-09-04 |
| 6276989 | Method and apparatus for controlling within-wafer uniformity in chemical mechanical polishing | W. Jarrett Campbell, Jeremy Lansford | 2001-08-21 |
| 6171174 | System and method for controlling a multi-arm polishing tool | William J. Campbell, Michael L. Miller | 2001-01-09 |
| 6155915 | System and method for independent air bearing zoning for semiconductor polishing device | — | 2000-12-05 |
| 6106661 | Polishing pad having a wear level indicator and system using the same | Kevin Shipley, Peter A. Burke | 2000-08-22 |
| 6057068 | Method for determining the efficiency of a planarization process | Thomas M. Brown, Peter A. Burke | 2000-05-02 |