Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6331137 | Polishing pad having open area which varies with distance from initial pad surface | Christopher H. Raeder | 2001-12-18 | $8,747,000 |
| 6110294 | Apparatus and method for cleaning semiconductor wafer | Peter A. Burke | 2000-08-29 | $7,735,000 |
| 6106661 | Polishing pad having a wear level indicator and system using the same | Christopher H. Raeder, Peter A. Burke | 2000-08-22 | $6,781,000 |
| 6051495 | Seasoning of a semiconductor wafer polishing pad to polish tungsten | Peter A. Burke, Peter J. Beckage | 2000-04-18 | $8,077,000 |
| 5966766 | Apparatus and method for cleaning semiconductor wafer | Peter A. Burke | 1999-10-19 | $1,257,000 |