| 7162326 |
Mask identification database server |
Michael R. Conboy, Horace Paul Bowser, Jr. |
2007-01-09 |
| 6985794 |
Management of move requests from a factory system to an automated material handling system |
Michael R. Conboy, Jason Grover |
2006-01-10 |
| 6699004 |
Wafer rotation in wafer handling devices |
Michael R. Conboy, Elfido Coss, Jr. |
2004-03-02 |
| 6662070 |
Wafer rotation randomization in cluster tool processing |
Michael R. Conboy, Sam Allen, Elfido Coss, Jr. |
2003-12-09 |
| 6662076 |
Management of move requests from a factory system to an automated material handling system |
Michael R. Conboy, Jason Grover |
2003-12-09 |
| 6457587 |
Integrated reticle sorter and stocker |
Michael R. Conboy, Elfido Coss, Jr. |
2002-10-01 |
| 6431814 |
Integrated wafer stocker and sorter with integrity verification system |
Eric Christensen, Michael R. Conboy, Elfido Coss, Jr. |
2002-08-13 |
| 6427095 |
Universal multi-tool adapter for reconfiguring a wafer processing line |
Sam Allen, Michael R. Conboy |
2002-07-30 |
| 6403905 |
Reticle stocking and sorting management system |
Michael R. Conboy, Elfido Coss, Jr. |
2002-06-11 |
| 6392403 |
Integrated wafer stocker and sorter apparatus |
Michael R. Conboy, Elfido Coss, Jr., Eric Christensen |
2002-05-21 |
| 6351684 |
Mask identification database server |
Michael R. Conboy, Horace Paul Bowser, Jr. |
2002-02-26 |
| 6216948 |
Protective rail with integrated workpiece sensors |
Michael R. Conboy |
2001-04-17 |