Issued Patents All Time
Showing 26–50 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790680 | Determining a possible cause of a fault in a semiconductor fabrication process | Jason Grover, Michael R. Conboy, Sam Allen | 2004-09-14 |
| 6792389 | Method of dynamically enabling additional sensors based upon initial sensor data, and system for accomplishing same | Sam Allen, Michael R. Conboy | 2004-09-14 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Jin Wang, Brian K. Cusson, Alexander J. Pasadyn, Michael L. Miller, Naomi M. Jenkins +1 more | 2004-08-17 |
| 6778876 | Methods of processing substrates based upon substrate orientation | Howard E. Castle | 2004-08-17 |
| 6763278 | Operating a processing tool in a degraded mode upon detecting a fault | Michael R. Conboy, Sam Allen | 2004-07-13 |
| 6740534 | Determination of a process flow based upon fault detection analysis | Ernest D. Adams, III, Matthew A. Purdy, Gregory A. Cherry, Eric O. Green, Brian K. Cusson +2 more | 2004-05-25 |
| 6725402 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Qingsu Wang, Terrence J. Riley | 2004-04-20 |
| 6711450 | Integration of business rule parameters in priority setting of wafer processing | Michael R. Conboy, Jason Grover | 2004-03-23 |
| 6699004 | Wafer rotation in wafer handling devices | Michael R. Conboy, Russel Shirley | 2004-03-02 |
| 6697696 | Fault detection control system using dual bus architecture, and methods of using same | Susan Hickey | 2004-02-24 |
| 6666337 | Method and apparatus for determining wafer identity and orientation | Michael R. Conboy, Sam Allen | 2003-12-23 |
| 6662070 | Wafer rotation randomization in cluster tool processing | Michael R. Conboy, Sam Allen, Russel Shirley | 2003-12-09 |
| 6640148 | Method and apparatus for scheduled controller execution based upon impending lot arrival at a processing tool in an APC framework | Michael L. Miller | 2003-10-28 |
| 6625556 | Wafer rotation randomization for process defect detection in semiconductor fabrication | Michael R. Conboy, Sam Allen | 2003-09-23 |
| 6622111 | Wafer rotation in semiconductor processing | Michael R. Conboy, Sam Allen | 2003-09-16 |
| 6594589 | Method and apparatus for monitoring tool health | Richard J. Markle, Patrick M. Cowan | 2003-07-15 |
| 6571371 | Method and apparatus for using latency time as a run-to-run control parameter | Michael R. Conboy, Bryce A. Hendrix | 2003-05-27 |
| 6556882 | Method and apparatus for generating real-time data from static files | Michael R. Conboy, Qingsu Wang | 2003-04-29 |
| 6546508 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Thomas J. Sonderman, Qingsu Wang | 2003-04-08 |
| 6532555 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Michael L. Miller, Qingsu Wang | 2003-03-11 |
| 6465263 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Thomas J. Sonderman, Robert Anderson | 2002-10-15 |
| 6457587 | Integrated reticle sorter and stocker | Michael R. Conboy, Russel Shirley | 2002-10-01 |
| 6449522 | Managing a semiconductor fabrication facility using wafer lot and cassette attributes | Michael R. Conboy, Patrick J. Ryan | 2002-09-10 |
| 6446022 | Wafer fabrication system providing measurement data screening | Brian K. Cusson, Mike Simpson | 2002-09-03 |
| 6440821 | Method and apparatus for aligning wafers | Michael R. Conboy, Sam Allen | 2002-08-27 |