Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8676538 | Adjusting weighting of a parameter relating to fault detection based on a detected fault | — | 2014-03-18 |
| 7849366 | Method and apparatus for predicting yield parameters based on fault classification | — | 2010-12-07 |
| 7715941 | Method and apparatus for scheduling a plurality of processing tools | — | 2010-05-11 |
| 7695986 | Method and apparatus for modifying process selectivities based on process state information | Matthew S. Ryskoski, Richard J. Markle | 2010-04-13 |
| 7473566 | Method and apparatus for controlling a film formation process with multiple objectives | Robert J. Chong | 2009-01-06 |
| 7460968 | Method and apparatus for selecting wafers for sampling | Richard P. Good | 2008-12-02 |
| 7299106 | Method and apparatus for scheduling metrology based on a jeopardy count | Cabe W. Nicksic | 2007-11-20 |
| 7296103 | Method and system for dynamically selecting wafer lots for metrology processing | Cabe W. Nicksic | 2007-11-13 |
| 7153709 | Method and apparatus for calibrating degradable components using process state data | Richard J. Markle | 2006-12-26 |
| 7131937 | Standing weightlifting apparatus | Stephen A. Skilken | 2006-11-07 |
| 7100081 | Method and apparatus for fault classification based on residual vectors | Robert J. Chong, Gregory A. Cherry, Richard J. Markle | 2006-08-29 |
| 7076321 | Method and system for dynamically adjusting metrology sampling based upon available metrology capacity | — | 2006-07-11 |
| 7067333 | Method and apparatus for implementing competing control models | Alexander J. Pasadyn | 2006-06-27 |
| 7069098 | Method and system for prioritizing material to clear exception conditions | — | 2006-06-27 |
| 7069103 | Controlling cumulative wafer effects | Christopher A. Bode | 2006-06-27 |
| 7026170 | Methods of controlling optical properties of a capping insulating layer on memory devices, and system for performing same | — | 2006-04-11 |
| 6991945 | Fault detection spanning multiple processes | Howard E. Castle, Gregory A. Cherry, Richard J. Markle, Eric O. Green, Michael L. Miller +1 more | 2006-01-31 |
| 6988045 | Dynamic metrology sampling methods, and system for performing same | — | 2006-01-17 |
| 6988225 | Verifying a fault detection result based on a process control state | Richard J. Markle, Timothy L. Jackson | 2006-01-17 |
| 6978189 | Matching data related to multiple metrology tools | Christopher A. Bode, Alexander J. Pasadyn | 2005-12-20 |
| 6967068 | Method of controlling stepper process parameters based upon optical properties of incoming anti-reflecting coating layers, and system for accomplishing same | Joyce S. Oey Hewett | 2005-11-22 |
| 6912436 | Prioritizing an application of correction in a multi-input control system | Gary Jones, Christopher A. Bode, Richard D. Edwards | 2005-06-28 |
| 6871114 | Updating process controller based upon fault detection analysis | Eric O. Green, Elfido Coss, Jr., Christopher A. Bode, Robert J. Chong, Gregory A. Cherry | 2005-03-22 |
| 6790752 | Methods of controlling VSS implants on memory devices, and system for performing same | — | 2004-09-14 |
| 6790686 | Method and apparatus for integrating dispatch and process control actions | Cabe W. Nicksic | 2004-09-14 |