Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8359494 | Parallel fault detection | Elfido Coss, Jr., Ernest D. Adams, III, Howard E. Castle, Thomas J. Sonderman, Alexander J. Pasadyn | 2013-01-22 |
| 7774670 | Method and apparatus for dynamically determining tester recipes | Richard J. Markle, Douglas C. Kimbrough, Eric O. Green | 2010-08-10 |
| 7473566 | Method and apparatus for controlling a film formation process with multiple objectives | Matthew A. Purdy | 2009-01-06 |
| 7424392 | Applying a self-adaptive filter to a drifting process | Jin Wang, Christopher A. Bode, Si QIN, Alexander J. Pasadyn | 2008-09-09 |
| 7186487 | Method of controlling exposure processes by monitoring photon levels, and system for accomplishing same | — | 2007-03-06 |
| 7117062 | Determining transmission of error effects for improving parametric performance | Thomas J. Sonderman, Brian K. Cusson, Alexander J. Pasadyn | 2006-10-03 |
| 7100081 | Method and apparatus for fault classification based on residual vectors | Matthew A. Purdy, Gregory A. Cherry, Richard J. Markle | 2006-08-29 |
| 7020535 | Method and apparatus for providing excitation for a process controller | Christopher A. Bode, J. Broc Stirton | 2006-03-28 |
| 6961636 | Method and apparatus for dynamically monitoring controller tuning parameters | Alexander J. Pasadyn, Thomas J. Sonderman | 2005-11-01 |
| 6953697 | Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same | Howard E. Castle, Brian K. Cusson, Eric O. Green | 2005-10-11 |
| 6912433 | Determining a next tool state based on fault detection information | Michael L. Miller, Alexander J. Pasadyn, Eric O. Green | 2005-06-28 |
| 6912437 | Method and apparatus for controlling a fabrication process based on a measured electrical characteristic | Jin Wang | 2005-06-28 |
| 6907369 | Method and apparatus for modifying design constraints based on observed performance | Richard J. Markle, Alexander J. Pasadyn | 2005-06-14 |
| 6871114 | Updating process controller based upon fault detection analysis | Eric O. Green, Matthew A. Purdy, Elfido Coss, Jr., Christopher A. Bode, Gregory A. Cherry | 2005-03-22 |
| 6842661 | Process control at an interconnect level | Eric O. Green | 2005-01-11 |
| 6804619 | Process control based on tool health data | Eric O. Green, Jin Wang | 2004-10-12 |
| 6790376 | Process control based upon weight or mass measurements, and systems for accomplishing same | Richard J. Markle | 2004-09-14 |
| 6554969 | Acoustically enhanced deposition processes, and systems for performing same | — | 2003-04-29 |