| 8040140 |
Method and apparatus for identifying broken pins in a test socket |
Christopher Wooten, Song Han, Douglas C. Kimbrough |
2011-10-18 |
| 7695986 |
Method and apparatus for modifying process selectivities based on process state information |
Matthew A. Purdy, Richard J. Markle |
2010-04-13 |
| 7282374 |
Method and apparatus for comparing device and non-device structures |
Kevin R. Lensing |
2007-10-16 |
| 7277824 |
Method and apparatus for classifying faults based on wafer state data and sensor tool trace data |
Kevin R. Lensing |
2007-10-02 |
| 7217578 |
Advanced process control of thermal oxidation processes, and systems for accomplishing same |
Michael J. McBride, Jesse C. Ramos, Mark E. Culp, Pirainder Lall |
2007-05-15 |
| 7197370 |
Method and apparatus for dynamic adjustment of an active sensor list |
— |
2007-03-27 |
| 6978187 |
Method and apparatus for scheduling production lots based on lot and tool health metrics |
— |
2005-12-20 |
| 6868353 |
Method and apparatus for determining wafer quality profiles |
— |
2005-03-15 |
| 6799311 |
Batch/lot organization based on quality characteristics |
— |
2004-09-28 |
| 6721616 |
Method and apparatus for determining control actions based on tool health and metrology data |
— |
2004-04-13 |
| 6617258 |
Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same |
Thomas J. Sonderman |
2003-09-09 |
| 6593227 |
Method and apparatus for planarizing surfaces of semiconductor device conductive layers |
— |
2003-07-15 |
| 6582975 |
Method of controlling the deposition of inter-level dielectric layers based upon electrical performance tests, and system for accomplishing same |
— |
2003-06-24 |
| 6371135 |
Method and apparatus for removing a particle from a surface of a semiconductor wafer |
— |
2002-04-16 |
