Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9157150 | Method of operating a processing chamber used in forming electronic devices | Michael Allen, Jeffrey P. Geuea, Allan T. Nelson | 2015-10-13 |
| 7217578 | Advanced process control of thermal oxidation processes, and systems for accomplishing same | Michael J. McBride, Mark E. Culp, Matthew S. Ryskoski, Pirainder Lall | 2007-05-15 |
| 6224678 | Modified thermocouple mounting bushing and system including the same | Blake Foster, Allan T. Nelson | 2001-05-01 |
| 6139640 | Chemical vapor deposition system and method employing a mass flow controller | Charles B. Silman | 2000-10-31 |