Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Advanced process control of thermal oxidation processes, and systems for accomplishing same

Advanced process control of thermal oxidation processes, and systems for accomplishing same

US Patent 7217578 · Granted May 15, 2007

Estimated economic value: $18,237,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Stretchable electronic material and devices2022
Method of operating a processing chamber used in forming electronic devices2015
Collection cup with a telescopic handle2015
Method and apparatus for identifying broken pins in a test socket2011
Method and apparatus for modifying process selectivities based on process state 2010
Portable vaporizer for plant material2008
Method and apparatus for comparing device and non-device structures2007
Method and apparatus for classifying faults based on wafer state data and sensor2007
Method and apparatus for dynamic adjustment of an active sensor list2007
Methods of controlling properties and characteristics of a gate insulation layer2007
Methods of controlling gate electrode doping, and systems for accomplishing same2006
Method and apparatus for scheduling production lots based on lot and tool health2005