Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for scheduling production lots based on lot and tool health metrics

Method and apparatus for scheduling production lots based on lot and tool health metrics

US Patent 6978187 · Granted Dec 20, 2005

Estimated economic value: $11,866,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for identifying broken pins in a test socket2011
Method and apparatus for modifying process selectivities based on process state 2010
Method and apparatus for comparing device and non-device structures2007
Method and apparatus for classifying faults based on wafer state data and sensor2007
Advanced process control of thermal oxidation processes, and systems for accompl2007
Method and apparatus for dynamic adjustment of an active sensor list2007
Method and apparatus for determining wafer quality profiles2005
Batch/lot organization based on quality characteristics2004
Method and apparatus for determining control actions based on tool health and me2004
Method of forming a gate insulation layer for a semiconductor device by controll2003
Method and apparatus for planarizing surfaces of semiconductor device conductive2003
Method of controlling the deposition of inter-level dielectric layers based upon2003