| 8149384 |
Method and apparatus for extracting dose and focus from critical dimension data |
Siddharth Chauhan, James Broc Stirton |
2012-04-03 |
$10,732,000 |
| 8041518 |
Determining die test protocols based on process health |
Michael G. McIntyre |
2011-10-18 |
$1,986,000 |
| 7983871 |
Method and apparatus for employing previous test insertion results for testing a device |
Douglas C. Kimbrough, Michael A. Retersdorf |
2011-07-19 |
$3,440,000 |
| 7925369 |
Method and apparatus for optimizing models for extracting dose and focus from critical dimension |
Siddharth Chauhan, James Broc Stirton |
2011-04-12 |
$5,867,000 |
| 7838308 |
Method of controlling embedded material/gate proximity |
Rohit Pal, David E. Brown, Alok Vaid |
2010-11-23 |
$5,148,000 |
| 7822567 |
Method and apparatus for implementing scaled device tests |
Michael G. McIntyre |
2010-10-26 |
$18,913,000 |
| 7738986 |
Method and apparatus for compensating metrology data for site bias prior to filtering |
James Broc Stirton, Richard P. Good |
2010-06-15 |
$14,576,000 |
| 7716004 |
Method and apparatus for matching test equipment calibration |
Elfido Coss, Jr., Eric O. Green, Rajesh Vijayaraghavan |
2010-05-11 |
$11,612,000 |
| 7682845 |
Methods for calibrating a process for growing an epitaxial silicon film and methods for growing an epitaxial silicon film |
Rohit Pal, Alok Vaid |
2010-03-23 |
$14,101,000 |
| 7519447 |
Method and apparatus for integrating multiple sample plans |
Christopher A. Bode |
2009-04-14 |
$5,338,000 |
| 7502702 |
Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities |
Richard J. Markle, Christopher A. Bode |
2009-03-10 |
$4,539,000 |
| 7337034 |
Method and apparatus for determining a root cause of a statistical process control failure |
Ernest D. Adams, III |
2008-02-26 |
$8,371,000 |
| 7282374 |
Method and apparatus for comparing device and non-device structures |
Matthew S. Ryskoski |
2007-10-16 |
$23,867,000 |
| 7277824 |
Method and apparatus for classifying faults based on wafer state data and sensor tool trace data |
Matthew S. Ryskoski |
2007-10-02 |
$16,573,000 |
| 7262864 |
Method and apparatus for determining grid dimensions using scatterometry |
Richard J. Markle, J. Broc Stirton, Marilyn I. Wright |
2007-08-28 |
$7,142,000 |
| 6980300 |
Method and apparatus for generating a polishing process endpoint signal using scatterometry |
James Broc Stirton |
2005-12-27 |
$8,074,000 |
| 6933158 |
Method of monitoring anneal processes using scatterometry, and system for performing same |
James Broc Stirton, Homi E. Nariman, Steven P. Reeves |
2005-08-23 |
$8,041,000 |
| 6927080 |
Structures for analyzing electromigration, and methods of using same |
Homi E. Nariman, James Broc Stirton, Steven P. Reeves |
2005-08-09 |
$9,550,000 |
| 6881594 |
Method of using scatterometry for analysis of electromigration, and structures for performing same |
James Broc Stirton, Steven P. Reeves, Homi E. Nariman |
2005-04-19 |
$11,122,000 |
| 6804014 |
Method and apparatus for determining contact opening dimensions using scatterometry |
Richard J. Markle, J. Broc Stirton, Marilyn I. Wright |
2004-10-12 |
$4,245,000 |
| 6785009 |
Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same |
James Broc Stirton, Hormuzdiar E. Nariman, Steven P. Reeves |
2004-08-31 |
$2,273,000 |
| 6774998 |
Method and apparatus for identifying misregistration in a complimentary phase shift mask process |
Marilyn I. Wright, James Broc Stirton |
2004-08-10 |
$1,968,000 |
| 6766215 |
Method and apparatus for detecting necking over field/active transitions |
Marilyn I. Wright |
2004-07-20 |
$1,607,000 |
| 6746882 |
Method of correcting non-linearity of metrology tools, and system for performing same |
James Broc Stirton |
2004-06-08 |
$3,316,000 |
| 6716646 |
Method and apparatus for performing overlay measurements using scatterometry |
Marilyn I. Wright, James Broc Stirton, Richard J. Markle |
2004-04-06 |
$3,021,000 |
