Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8149384 | Method and apparatus for extracting dose and focus from critical dimension data | Siddharth Chauhan, James Broc Stirton | 2012-04-03 |
| 8041518 | Determining die test protocols based on process health | Michael G. McIntyre | 2011-10-18 |
| 7983871 | Method and apparatus for employing previous test insertion results for testing a device | Douglas C. Kimbrough, Michael A. Retersdorf | 2011-07-19 |
| 7925369 | Method and apparatus for optimizing models for extracting dose and focus from critical dimension | Siddharth Chauhan, James Broc Stirton | 2011-04-12 |
| 7838308 | Method of controlling embedded material/gate proximity | Rohit Pal, David E. Brown, Alok Vaid | 2010-11-23 |
| 7822567 | Method and apparatus for implementing scaled device tests | Michael G. McIntyre | 2010-10-26 |
| 7738986 | Method and apparatus for compensating metrology data for site bias prior to filtering | James Broc Stirton, Richard P. Good | 2010-06-15 |
| 7716004 | Method and apparatus for matching test equipment calibration | Elfido Coss, Jr., Eric O. Green, Rajesh Vijayaraghavan | 2010-05-11 |
| 7682845 | Methods for calibrating a process for growing an epitaxial silicon film and methods for growing an epitaxial silicon film | Rohit Pal, Alok Vaid | 2010-03-23 |
| 7519447 | Method and apparatus for integrating multiple sample plans | Christopher A. Bode | 2009-04-14 |
| 7502702 | Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities | Richard J. Markle, Christopher A. Bode | 2009-03-10 |
| 7337034 | Method and apparatus for determining a root cause of a statistical process control failure | Ernest D. Adams, III | 2008-02-26 |
| 7282374 | Method and apparatus for comparing device and non-device structures | Matthew S. Ryskoski | 2007-10-16 |
| 7277824 | Method and apparatus for classifying faults based on wafer state data and sensor tool trace data | Matthew S. Ryskoski | 2007-10-02 |
| 7262864 | Method and apparatus for determining grid dimensions using scatterometry | Richard J. Markle, J. Broc Stirton, Marilyn I. Wright | 2007-08-28 |
| 6980300 | Method and apparatus for generating a polishing process endpoint signal using scatterometry | James Broc Stirton | 2005-12-27 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | James Broc Stirton, Homi E. Nariman, Steven P. Reeves | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | Homi E. Nariman, James Broc Stirton, Steven P. Reeves | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | James Broc Stirton, Steven P. Reeves, Homi E. Nariman | 2005-04-19 |
| 6804014 | Method and apparatus for determining contact opening dimensions using scatterometry | Richard J. Markle, J. Broc Stirton, Marilyn I. Wright | 2004-10-12 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same | James Broc Stirton, Hormuzdiar E. Nariman, Steven P. Reeves | 2004-08-31 |
| 6774998 | Method and apparatus for identifying misregistration in a complimentary phase shift mask process | Marilyn I. Wright, James Broc Stirton | 2004-08-10 |
| 6766215 | Method and apparatus for detecting necking over field/active transitions | Marilyn I. Wright | 2004-07-20 |
| 6746882 | Method of correcting non-linearity of metrology tools, and system for performing same | James Broc Stirton | 2004-06-08 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Marilyn I. Wright, James Broc Stirton, Richard J. Markle | 2004-04-06 |