Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972853 | Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same | James Broc Stirton | 2005-12-06 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | Kevin R. Lensing, James Broc Stirton, Steven P. Reeves | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | James Broc Stirton, Kevin R. Lensing, Steven P. Reeves | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | James Broc Stirton, Steven P. Reeves, Kevin R. Lensing | 2005-04-19 |
| 6791697 | Scatterometry structure with embedded ring oscillator, and methods of using same | — | 2004-09-14 |
| 6767835 | Method of making a shaped gate electrode structure, and device comprising same | David E. Brown | 2004-07-27 |
| 6742168 | Method and structure for calibrating scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device | — | 2004-05-25 |
| 6660543 | Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth | James Broc Stirton, Kevin R. Lensing, Steven P. Reeves | 2003-12-09 |
| 6372668 | Method of forming silicon oxynitride films | Sey-Ping Sun, Hartmut Ruelke | 2002-04-16 |
| 6265283 | Self-aligning silicon oxynitride stack for improved isolation structure | Sey-Ping Sun, H. Jim Fulford | 2001-07-24 |
| 6249032 | Semiconductor device having patterned metal layer over a polysilicon line and method of fabrication thereof | H. Jim Fulford, Charles E. May | 2001-06-19 |
| 6157081 | High-reliability damascene interconnect formation for semiconductor fabrication | H. Jim Fulford | 2000-12-05 |
| 6146952 | Semiconductor device having self-aligned asymmetric source/drain regions and method of fabrication thereof | H. Jim Fulford, Charles E. May | 2000-11-14 |
| 6096643 | Method of fabricating a semiconductor device having polysilicon line with extended silicide layer | H. Jim Fulford, Charles E. May | 2000-08-01 |