| 7236848 |
Data representation relating to a non-sampled workpiece |
Michael G. McIntyre |
2007-06-26 |
| 6933158 |
Method of monitoring anneal processes using scatterometry, and system for performing same |
Kevin R. Lensing, James Broc Stirton, Homi E. Nariman |
2005-08-23 |
| 6927080 |
Structures for analyzing electromigration, and methods of using same |
Homi E. Nariman, James Broc Stirton, Kevin R. Lensing |
2005-08-09 |
| 6881594 |
Method of using scatterometry for analysis of electromigration, and structures for performing same |
James Broc Stirton, Homi E. Nariman, Kevin R. Lensing |
2005-04-19 |
| 6785009 |
Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same |
James Broc Stirton, Kevin R. Lensing, Hormuzdiar E. Nariman |
2004-08-31 |
| 6660543 |
Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth |
James Broc Stirton, Kevin R. Lensing, Homi E. Nariman |
2003-12-09 |