Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7236848 | Data representation relating to a non-sampled workpiece | Michael G. McIntyre | 2007-06-26 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | Kevin R. Lensing, James Broc Stirton, Homi E. Nariman | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | Homi E. Nariman, James Broc Stirton, Kevin R. Lensing | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | James Broc Stirton, Homi E. Nariman, Kevin R. Lensing | 2005-04-19 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same | James Broc Stirton, Kevin R. Lensing, Hormuzdiar E. Nariman | 2004-08-31 |
| 6660543 | Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth | James Broc Stirton, Kevin R. Lensing, Homi E. Nariman | 2003-12-09 |