Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10289109 | Methods of error detection in fabrication processes | Richard P. Good, Eugene Barash, Daniel Kost | 2019-05-14 |
| 10241502 | Methods of error detection in fabrication processes | Eugene Barash, Richard P. Good | 2019-03-26 |
| 8149384 | Method and apparatus for extracting dose and focus from critical dimension data | Siddharth Chauhan, Kevin R. Lensing | 2012-04-03 |
| 7925369 | Method and apparatus for optimizing models for extracting dose and focus from critical dimension | Siddharth Chauhan, Kevin R. Lensing | 2011-04-12 |
| 7869894 | Method and system for advanced process control using a combination of weighted relative bias values | Andre Holfeld | 2011-01-11 |
| 7840298 | Method and system for advanced process control using measurement uncertainty as control input | Hans-Juergen Malig | 2010-11-23 |
| 7831324 | Method and system for randomizing wafers in a complex process line | Richard P. Good | 2010-11-09 |
| 7738986 | Method and apparatus for compensating metrology data for site bias prior to filtering | Kevin R. Lensing, Richard P. Good | 2010-06-15 |
| 7565254 | Method and apparatus for metrology sampling using combination sampling rules | Richard P. Good | 2009-07-21 |
| 7330800 | Method and apparatus for selecting sites for sampling | Richard P. Good | 2008-02-12 |
| 6989900 | Method of measuring implant profiles using scatterometric techniques | — | 2006-01-24 |
| 6980300 | Method and apparatus for generating a polishing process endpoint signal using scatterometry | Kevin R. Lensing | 2005-12-27 |
| 6972853 | Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same | Homi E. Nariman | 2005-12-06 |
| 6968252 | Method and apparatus for dispatching based on metrology tool performance | Alexander J. Pasadyn | 2005-11-22 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | Kevin R. Lensing, Homi E. Nariman, Steven P. Reeves | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | Homi E. Nariman, Kevin R. Lensing, Steven P. Reeves | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | Steven P. Reeves, Homi E. Nariman, Kevin R. Lensing | 2005-04-19 |
| 6859746 | Methods of using adaptive sampling techniques based upon categorization of process variations, and system for performing same | — | 2005-02-22 |
| 6836691 | Method and apparatus for filtering metrology data based on collection purpose | — | 2004-12-28 |
| 6808946 | Method of using critical dimension measurements to control stepper process parameters | Richard D. Edwards, Christopher A. Bode | 2004-10-26 |
| 6790570 | Method of using scatterometry measurements to control stepper process parameters | Richard D. Edwards, Christopher A. Bode | 2004-09-14 |
| 6785009 | Method of using high yielding spectra scatterometry measurements to control semiconductor manufacturing processes, and systems for accomplishing same | Kevin R. Lensing, Hormuzdiar E. Nariman, Steven P. Reeves | 2004-08-31 |
| 6774998 | Method and apparatus for identifying misregistration in a complimentary phase shift mask process | Marilyn I. Wright, Kevin R. Lensing | 2004-08-10 |
| 6746882 | Method of correcting non-linearity of metrology tools, and system for performing same | Kevin R. Lensing | 2004-06-08 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Marilyn I. Wright, Kevin R. Lensing, Richard J. Markle | 2004-04-06 |