Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7700467 | Methodology of implementing ultra high temperature (UHT) anneal in fabricating devices that contain sige | Haowen Bu, Periannan Chidambaram | 2010-04-20 |
| 7324865 | Run-to-run control method for automated control of metal deposition processes | Thomas J. Sonderman, Craig W. Christian | 2008-01-29 |
| 6850322 | Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace | William J. Campbell, Thomas J. Sonderman, Elfido Coss, Jr. | 2005-02-01 |
| 6734088 | Control of two-step gate etch process | Matthew A. Purdy, James H. Hussey, Jr., Douglas J. Bonser | 2004-05-11 |
| 6709797 | Method and apparatus for controlling focus based on a thickness of a layer of photoresist | Anastasia Lynn Oshelski Peterson, Edward C. Stewart, Curtis Warren Doss | 2004-03-23 |
| 6546306 | Method for adjusting incoming film thickness uniformity such that variations across the film after polishing minimized | William J. Campbell | 2003-04-08 |
| 6535783 | Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework | Michael L. Miller | 2003-03-18 |
| 6417912 | Method and apparatus for controlling optical-parameters in a stepper | Anthony J. Toprac, Richard D. Edwards, Edward C. Stewart | 2002-07-09 |