Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6709797 | Method and apparatus for controlling focus based on a thickness of a layer of photoresist | Scott Bushman, Anastasia Lynn Oshelski Peterson, Edward C. Stewart | 2004-03-23 | $3,151,000 |
| 6551751 | Method and apparatus for controlling a stepper | Anthony J. Toprac, Richard D. Edwards | 2003-04-22 | $3,266,000 |
| 6440622 | Method for controlling and monitoring light source intensity | Anthony J. Toprac, Richard D. Edwards | 2002-08-27 | $1,474,000 |
| 6266132 | Stepper with exposure time monitor | Edward C. Stewart, Richard D. Edwards | 2001-07-24 | $3,903,000 |