Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7720559 | Dynamic tool scheduling based upon defects | — | 2010-05-18 |
| 7620470 | Method and apparatus for impasse detection and resolution | Susan Hickey, Jason Grover, Cabe W. Nicksic | 2009-11-17 |
| 6890773 | Dynamic maintenance of manufacturing system components | — | 2005-05-10 |
| 6850811 | Analyzing error signals based on fault detection | — | 2005-02-01 |
| 6766258 | Method and apparatus for dynamically enabling trace data collection | Susan Hickey | 2004-07-20 |
| 6754593 | Method and apparatus for measuring defects | Jason Grover | 2004-06-22 |
| 6709797 | Method and apparatus for controlling focus based on a thickness of a layer of photoresist | Scott Bushman, Anastasia Lynn Oshelski Peterson, Curtis Warren Doss | 2004-03-23 |
| 6563300 | Method and apparatus for fault detection using multiple tool error signals | Timothy L. Jackson, Richard J. Markle | 2003-05-13 |
| 6417912 | Method and apparatus for controlling optical-parameters in a stepper | Scott Bushman, Anthony J. Toprac, Richard D. Edwards | 2002-07-09 |
| 6266132 | Stepper with exposure time monitor | Curtis Warren Doss, Richard D. Edwards | 2001-07-24 |
| 6027190 | High density linear motion storage system | C. Allen Stewart | 2000-02-22 |