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Dynamic tool scheduling based upon defects |
— |
2010-05-18 |
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Method and apparatus for impasse detection and resolution |
Susan Hickey, Jason Grover, Cabe W. Nicksic |
2009-11-17 |
| 6890773 |
Dynamic maintenance of manufacturing system components |
— |
2005-05-10 |
| 6850811 |
Analyzing error signals based on fault detection |
— |
2005-02-01 |
| 6766258 |
Method and apparatus for dynamically enabling trace data collection |
Susan Hickey |
2004-07-20 |
| 6754593 |
Method and apparatus for measuring defects |
Jason Grover |
2004-06-22 |
| 6709797 |
Method and apparatus for controlling focus based on a thickness of a layer of photoresist |
Scott Bushman, Anastasia Lynn Oshelski Peterson, Curtis Warren Doss |
2004-03-23 |
| 6563300 |
Method and apparatus for fault detection using multiple tool error signals |
Timothy L. Jackson, Richard J. Markle |
2003-05-13 |
| 6417912 |
Method and apparatus for controlling optical-parameters in a stepper |
Scott Bushman, Anthony J. Toprac, Richard D. Edwards |
2002-07-09 |
| 6266132 |
Stepper with exposure time monitor |
Curtis Warren Doss, Richard D. Edwards |
2001-07-24 |
| 6027190 |
High density linear motion storage system |
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2000-02-22 |