Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dynamic tool scheduling based upon defects

Dynamic tool scheduling based upon defects

US Patent 7720559 · Granted May 18, 2010

Estimated economic value: $8,134,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for impasse detection and resolution2009
Dynamic maintenance of manufacturing system components2005
Analyzing error signals based on fault detection2005
Method and apparatus for dynamically enabling trace data collection2004
Method and apparatus for measuring defects2004
Method and apparatus for controlling focus based on a thickness of a layer of ph2004
Method and apparatus for fault detection using multiple tool error signals2003
Method and apparatus for controlling optical-parameters in a stepper2002
Stepper with exposure time monitor2001
High density linear motion storage system2000