Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960774 | Fault detection and control methodologies for ion implantation processes, and system for performing same | Elfido Coss, Jr., Patrick M. Cowan, Richard J. Markle | 2005-11-01 |
| 6797967 | Method and system for dose control during an ion implantation process | Zhiyong Zhao, David M. Hendrix | 2004-09-28 |
| 6428690 | Filter module with improved backwash capability | — | 2002-08-06 |