Issued Patents All Time
Showing 26–50 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823231 | Tuning of a process control based upon layer dependencies | Alexander J. Pasadyn | 2004-11-23 |
| 6821792 | Method and apparatus for determining a sampling plan based on process and equipment state information | Thomas J. Sonderman, Alexander J. Pasadyn | 2004-11-23 |
| 6815232 | Method and apparatus for overlay control using multiple targets | Gary Jones, Richard D. Edwards | 2004-11-09 |
| 6810296 | Correlating an inline parameter to a device operation parameter | Gregory A. Cherry, Rick G. Good | 2004-10-26 |
| 6808946 | Method of using critical dimension measurements to control stepper process parameters | James Broc Stirton, Richard D. Edwards | 2004-10-26 |
| 6801817 | Method and apparatus for integrating multiple process controllers | Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-10-05 |
| 6790570 | Method of using scatterometry measurements to control stepper process parameters | James Broc Stirton, Richard D. Edwards | 2004-09-14 |
| 6788988 | Method and apparatus using integrated metrology data for pre-process and post-process control | Alexander J. Pasadyn | 2004-09-07 |
| 6785586 | Method and apparatus for adaptively scheduling tool maintenance | Anthony J. Toprac, Thomas J. Sonderman, Alexander J. Pasadyn, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2004-08-31 |
| 6778873 | Identifying a cause of a fault based on a process controller output | Jin Wang, Elfido Coss, Jr., Brian K. Cusson, Alexander J. Pasadyn, Michael L. Miller +1 more | 2004-08-17 |
| 6756243 | Method and apparatus for cascade control using integrated metrology | Alexander J. Pasadyn | 2004-06-29 |
| 6751518 | Dynamic process state adjustment of a processing tool to reduce non-uniformity | Thomas J. Sonderman, Alexander J. Pasadyn | 2004-06-15 |
| 6746308 | Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same | Alexander J. Pasadyn | 2004-06-08 |
| 6745086 | Method and apparatus for determining control actions incorporating defectivity effects | Alexander J. Pasadyn, Thomas J. Sonderman | 2004-06-01 |
| 6741903 | Method for relating photolithography overlay target damage and chemical mechanical planarization (CMP) fault detection to CMP tool indentification | Anthony J. Toprac | 2004-05-25 |
| 6737208 | Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information | Alexander J. Pasadyn | 2004-05-18 |
| 6732007 | Method and apparatus for implementing dynamic qualification recipes | Alexander J. Pasadyn | 2004-05-04 |
| 6708075 | Method and apparatus for utilizing integrated metrology data as feed-forward data | Thomas J. Sonderman, Alexander J. Pasadyn | 2004-03-16 |
| 6699727 | Method for prioritizing production lots based on grade estimates and output requirements | Anthony J. Toprac, Joyce S. Oey Hewett, Alexander J. Pasadyn, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-03-02 |
| 6698009 | Method and apparatus for modeling of batch dynamics based upon integrated metrology | Alexander J. Pasadyn | 2004-02-24 |
| 6687561 | Method and apparatus for determining a sampling plan based on defectivity | Alexander J. Pasadyn | 2004-02-03 |
| 6675058 | Method and apparatus for controlling the flow of wafers through a process flow | Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2004-01-06 |
| 6664013 | Methods of characterizing device performance based upon the duration of an endpointed photoresist develop process, and system for accomplishing same | Joyce S. Oey Hewett | 2003-12-16 |
| 6665623 | Method and apparatus for optimizing downstream uniformity | Alexander J. Pasadyn | 2003-12-16 |
| 6650955 | Method and apparatus for determining a sampling plan based on process and equipment fingerprinting | Thomas J. Sonderman, Alexander J. Pasadyn | 2003-11-18 |