Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6790376 | Process control based upon weight or mass measurements, and systems for accomplishing same | Robert J. Chong | 2004-09-14 |
| 6716646 | Method and apparatus for performing overlay measurements using scatterometry | Marilyn I. Wright, Kevin R. Lensing, James Broc Stirton | 2004-04-06 |
| 6701206 | Method and system for controlling a process tool | Lance Nevala | 2004-03-02 |
| 6677170 | Method for determining process layer thickness using scatterometry measurements | — | 2004-01-13 |
| 6660651 | Adjustable wafer stage, and a method and system for performing process operations using same | — | 2003-12-09 |
| 6650423 | Method and apparatus for determining column dimensions using scatterometry | Kevin R. Lensing, J. Broc Stirton, Marilyn I. Wright | 2003-11-18 |
| 6639663 | Method and apparatus for detecting processing faults using scatterometry measurements | Matthew A. Purdy | 2003-10-28 |
| 6621412 | Troubleshooting method involving image-based fault detection and classification (FDC) and troubleshooting guide (TSG), and systems embodying the method | Elizabeth Weaver | 2003-09-16 |
| 6602723 | Method of integrating scatterometry metrology structures directly into die design | James Broc Stirton | 2003-08-05 |
| 6594589 | Method and apparatus for monitoring tool health | Elfido Coss, Jr., Patrick M. Cowan | 2003-07-15 |
| 6563300 | Method and apparatus for fault detection using multiple tool error signals | Timothy L. Jackson, Edward C. Stewart | 2003-05-13 |
| 6529282 | Method of controlling photolithography processes based upon scatterometric measurements of photoresist thickness, and system for accomplishing same | James Broc Stirton | 2003-03-04 |
| 6046796 | Methodology for improved semiconductor process monitoring using optical emission spectroscopy | Michael J. Gatto, Chris A. Nauert, Yi Cheng, Richard Bruce Patty | 2000-04-04 |
| 5999886 | Measurement system for detecting chemical species within a semiconductor processing device chamber | Michel Martin, James K. Fidler | 1999-12-07 |
| 5686996 | Device and method for aligning a laser | James K. Fidler | 1997-11-11 |