| 11162364 |
Repair of monocrystalline flow channel segments by monocrystalline remelting |
Knut Partes |
2021-11-02 |
| 10099583 |
Method for producing an element having a cover, and such an element |
— |
2018-10-16 |
| 9957404 |
Low odor polymer latex and coating composition comprising the same |
Claudia Eigen, Martina Pieper, Bertholt Schostak, Gareth Simpson, Michael Voss |
2018-05-01 |
| 8888947 |
Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements |
Matthias Schaller, Mathias Baranyai |
2014-11-18 |
| 8672404 |
Profile for fastening a cover on a vehicular seat headrest |
Lars Hennig, Axel Posnien |
2014-03-18 |
| 8388062 |
Profile for fastening a cover on a vehicular seat headrest |
Lars Hennig, Axel Posnien |
2013-03-05 |
| 8155770 |
Method and apparatus for dispatching workpieces to tools based on processing and performance history |
Robert Barlovic, Jan Raebiger, Joerg Weigang, Jens Busch, Rolf Seltmann |
2012-04-10 |
| 8039181 |
Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario |
Rolf Seltmann, Jens Busch |
2011-10-18 |
| 7842442 |
Method and system for reducing overlay errors within exposure fields by APC control strategies |
Rolf Seltmann, Bernd Schulz, Fritjof Hempel |
2010-11-30 |
| 7810237 |
Method for repairing and/or modifying component parts of a gas turbine |
Anja Lange, Jens Lange |
2010-10-12 |
| 7704889 |
Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements |
Matthias Schaller, Mathias Baranyai |
2010-04-27 |
| 7618755 |
Method and system for automatically detecting exposed substrates having a high probability for defocused exposure fields |
Jens Krause, Rolf Seltmann |
2009-11-17 |
| 7547561 |
Advanced process control model incorporating a target offset term |
Martin Mazur, Andreas Becker |
2009-06-16 |
| 7542880 |
Time weighted moving average filter |
Richard P. Good, Kevin Andrew Chamness |
2009-06-02 |
| 7403832 |
Method and system for advanced process control including tool dependent machine constants |
Uwe Knappe |
2008-07-22 |
| 7233835 |
Method and system for estimating a state of an uninitialized advanced process controller by using segregated controller data |
Richard P. Good |
2007-06-19 |
| 7200455 |
Method of process control |
— |
2007-04-03 |
| 7006195 |
Method and system for improving exposure uniformity in a step and repeat process |
Jan Raebiger, Heiko Wagner, Rolf Seltmann |
2006-02-28 |
| 6946411 |
Method and system for improving the efficiency of a mechanical alignment tool |
Uwe Knappe, Jan Raebiger, Rolf Seltmann |
2005-09-20 |
