Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8155770 | Method and apparatus for dispatching workpieces to tools based on processing and performance history | Robert Barlovic, Uwe Schulze, Jan Raebiger, Joerg Weigang, Rolf Seltmann | 2012-04-10 |
| 8039181 | Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario | Rolf Seltmann, Uwe Schulze | 2011-10-18 |