Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8155770 | Method and apparatus for dispatching workpieces to tools based on processing and performance history | Robert Barlovic, Uwe Schulze, Jan Raebiger, Joerg Weigang, Rolf Seltmann | 2012-04-10 | $5,913,000 |
| 8039181 | Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario | Rolf Seltmann, Uwe Schulze | 2011-10-18 | $1,986,000 |