Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7842442 | Method and system for reducing overlay errors within exposure fields by APC control strategies | Rolf Seltmann, Bernd Schulz, Uwe Schulze | 2010-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7842442 | Method and system for reducing overlay errors within exposure fields by APC control strategies | Rolf Seltmann, Bernd Schulz, Uwe Schulze | 2010-11-30 |