Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7403832 | Method and system for advanced process control including tool dependent machine constants | Uwe Schulze | 2008-07-22 | $4,320,000 |
| 6946411 | Method and system for improving the efficiency of a mechanical alignment tool | Jan Raebiger, Uwe Schulze, Rolf Seltmann | 2005-09-20 | $11,506,000 |