Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146132 | Mobile dispense device for chemicals used in micro-processing | Sidheswara Mahapatra, Wolfram Grundke | 2018-12-04 |
| 10007198 | Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track | Sidheswara Mahapatra | 2018-06-26 |
| 7962459 | Method of providing context specific recipes in a semiconductor facility by defining product categories | Kay Hellig, Ronald Grünz, Uwe Liebold | 2011-06-14 |
| 7346407 | Method of operating an advanced process controller by dynamically adapting hierarchy levels | Jan Raebiger | 2008-03-18 |
| 7325224 | Method and system for increasing product yield by controlling lithography on the basis of electrical speed data | Rolf Seltmann, Rolf Stephan | 2008-01-29 |
| 7006195 | Method and system for improving exposure uniformity in a step and repeat process | Jan Raebiger, Uwe Schulze, Rolf Seltmann | 2006-02-28 |