Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7962459 | Method of providing context specific recipes in a semiconductor facility by defining product categories | Kay Hellig, Ronald Grünz, Heiko Wagner | 2011-06-14 | $3,418,000 |
| 7130762 | Method and system for handling substrates in a production line including a cluster tool and a metrology tool | Kay Hellig, Peter Goerigk, Ronald Gruenz, Karl-Heinz Fandrey | 2006-10-31 | $12,737,000 |