Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130762 | Method and system for handling substrates in a production line including a cluster tool and a metrology tool | Kay Hellig, Uwe Liebold, Ronald Gruenz, Karl-Heinz Fandrey | 2006-10-31 |
| 6303398 | Method and system of managing wafers in a semiconductor device production facility | — | 2001-10-16 |