Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130762 | Method and system for handling substrates in a production line including a cluster tool and a metrology tool | Kay Hellig, Peter Goerigk, Uwe Liebold, Karl-Heinz Fandrey | 2006-10-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130762 | Method and system for handling substrates in a production line including a cluster tool and a metrology tool | Kay Hellig, Peter Goerigk, Uwe Liebold, Karl-Heinz Fandrey | 2006-10-31 |