Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7130762 | Method and system for handling substrates in a production line including a cluster tool and a metrology tool | Kay Hellig, Peter Goerigk, Uwe Liebold, Ronald Gruenz | 2006-10-31 |