Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481592 | Selecting manufacturing settings based on historical data from manufacturing tools | Richard P. Good, Dirk Gleitsmann | 2019-11-19 |
| 8660681 | Method and system for excursion monitoring in optical lithography processes in micro device fabrication | Andre Poock, Heike Scholtz | 2014-02-25 |