Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Tuning a process controller based on a dynamic sampling rate

Tuning a process controller based on a dynamic sampling rate

US Patent 8180471 · Granted May 15, 2012

Estimated economic value: $7,029,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for detecting a defect in a specimen2025
Overlay optimization2021
Initializing individual exposure field parameters of an overlay controller2020
Across-wafer profile control in semiconductor processes2020
Selecting manufacturing settings based on historical data from manufacturing too2019
Methods of error detection in fabrication processes2019
Methods of error detection in fabrication processes2019
Method, storage medium and system for controlling the processing of lots of work2017
Work-in-progress substrate processing methods and systems for use in the fabrica2017
Method and system for semiconductor process control and monitoring by using PCA 2012
Method and system for a two-step prediction of a quality distribution of semicon2011
Identifying manufacturing disturbances using preliminary electrical test data2011