Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8323471 | Automatic deposition profile targeting | Markus Nopper, Dirk Wollstein | 2012-12-04 | $1,677,000 |
| 7899570 | Advanced automatic deposition profile targeting and control by applying advanced polish endpoint system feedback | Markus Nopper, Thomas Harold Roessler | 2011-03-01 | $8,863,000 |
| 7781329 | Reducing leakage in dielectric materials including metal regions including a metal cap layer in semiconductor devices | Axel Preusse, Markus Nopper, Juergen Boemmels | 2010-08-24 | $5,281,000 |