Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966315 | Advanced process control methods for process-aware dimension targeting | Frank Kahlenberg, Sirko Kramp, Roberto Schiwon, Rolf Seltmann | 2018-05-08 |
| 9798244 | Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity | Arthur Hotzel, Remi Riviere, Wolfram Grundke | 2017-10-24 |