Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112515 | Technique for generating a labeled set of images | Matthieu Ferrato, Henrique Candeias | 2024-10-08 |
| 10161915 | In-situ contactless monitoring of photomask pellicle degradation | Arthur Hotzel | 2018-12-25 |
| 9798244 | Methods, apparatus, and systems for minimizing defectivity in top-coat-free lithography and improving reticle CD uniformity | Arthur Hotzel, Philipp Jaschinsky, Wolfram Grundke | 2017-10-24 |
| 9177874 | Method of forming a semiconductor device employing an optical planarization layer | Joachim Patzer, Ardechir Pakfar, Dominic Thurmer, Chih-Chun Wang, Robert Melzer +2 more | 2015-11-03 |