Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9177874 | Method of forming a semiconductor device employing an optical planarization layer | Joachim Patzer, Ardechir Pakfar, Dominic Thurmer, Chih-Chun Wang, Remi Riviere +2 more | 2015-11-03 | $718,000 |
| 9076688 | Scatterometry for nested and isolated structures | Robert C. Lutz | 2015-07-07 | $909,000 |