Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9177874 | Method of forming a semiconductor device employing an optical planarization layer | Joachim Patzer, Ardechir Pakfar, Dominic Thurmer, Chih-Chun Wang, Remi Riviere +2 more | 2015-11-03 |
| 9076688 | Scatterometry for nested and isolated structures | Robert C. Lutz | 2015-07-07 |