Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6356340 | Piezo programmable reticle for EUV lithography | — | 2002-03-12 |
| 6255125 | Method and apparatus for compensating for critical dimension variations in the production of a semiconductor wafer | Regina Tien Schmidt, Anna M. Minvielle, Marina V. Plat, Khanh B. Nguyen | 2001-07-03 |
| 6191034 | Forming minimal size spaces in integrated circuit conductive lines | Richard K. Klein, Asim A. Selcuk, Nicholas J. Kepler, Raymond T. Lee, John C. Holst +1 more | 2001-02-20 |
| 6187483 | Mask quality measurements by fourier space analysis | Luigi Capodieci | 2001-02-13 |
| 6171739 | Method of determining focus and coma of a lens at various locations in an imaging field | Regina Tien Schmidt | 2001-01-09 |
| 6146954 | Minimizing transistor size in integrated circuits | Richard K. Klein, Asim A. Selcuk, Nicholas J. Kepler, Craig S. Sander, Raymond T. Lee +2 more | 2000-11-14 |
| 6051881 | Forming local interconnects in integrated circuits | Richard K. Klein, Asim A. Selcuk, Nicholas J. Kepler, Craig S. Sander, Raymond T. Lee +2 more | 2000-04-18 |
| 6046088 | Method for self-aligning polysilicon gates with field isolation and the resultant structure | Richard K. Klein, Asim A. Selcuk, Nicholas J. Kepler, Craig S. Sander, Raymond T. Lee +2 more | 2000-04-04 |
| 5928813 | Attenuated phase shift mask | Zoran Krivokapic | 1999-07-27 |
| 5930659 | Forming minimal size spaces in integrated circuit conductive lines | Richard K. Klein, Asim A. Selcuk, Nicholas J. Kepler, Raymond T. Lee, John C. Holst +1 more | 1999-07-27 |
| 5844836 | Memory cell having increased capacitance via a local interconnect to gate capacitor and a method for making such a cell | Nicholas J. Kepler, Asim A. Selcuk, Richard K. Klein, Craig S. Sander, John C. Holst +2 more | 1998-12-01 |
| 5796651 | Memory device using a reduced word line voltage during read operations and a method of accessing such a memory device | Stephen C. Horne, Richard K. Klein, Asim A. Selcuk, Nicholas J. Kepler, Raymond T. Lee +1 more | 1998-08-18 |
| 5766806 | Method of optical lithography using phase shift masking | — | 1998-06-16 |
| 5766804 | Method of optical lithography using phase shift masking | — | 1998-06-16 |
| 5702848 | Mask for optical lithography using phase shift masking and integrated circuit produced therefrom | — | 1997-12-30 |
| 5601954 | Attenuated phase shift mask comprising phase shifting layer with parabolically shaped sidewalls | Zoran Krivokapic | 1997-02-11 |
| 5573890 | Method of optical lithography using phase shift masking | — | 1996-11-12 |