Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Voltage contrast metrology mark

Voltage contrast metrology mark

US Patent 12169366 · Granted Dec 17, 2024

Estimated economic value: $305,277,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Non-correctable error in metrology2025
In-resist process for high density contact formation2025
Method for controlling a lithographic apparatus and associated apparatuses2025
Method of determining control parameters of a device manufacturing process2025
Metrology apparatus and method for determining a characteristic of one or more s2024
Method to predict yield of a device manufacturing process2024
Method to predict yield of a device manufacturing process2024
Method of manufacturing devices2024
Method of manufacturing devices2024
Method for controlling a manufacturing process and associated apparatuses2024
Method for controlling a manufacturing process and associated apparatuses2024
Process window based on defect probability2023