Method of determining control parameters of a device manufacturing process

Assignee

• Asml Netherlands B.V.

Inventors

• Wim Tjibbo Tel (70 patents)
• Mark John Maslow (11 patents)
• Koenraad VAN INGEN SCHENAU (7 patents)
• Patrick Warnaar (52 patents)
• Abraham SLACHTER (9 patents)
• Roy ANUNCIADO (6 patents)
• Simon Hendrik Celine Van Gorp (11 patents)
• Frank Staals (58 patents)
• Marinus Jochemsen (26 patents)

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