Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7276328 | Lithography mask utilizing asymmetric light source | Cyrus E. Tabery, Bruno M. LaFontaine | 2007-10-02 | $16,573,000 |
| 6950176 | Method and system for monitoring EUV lithography mask flatness | Bruno M. LaFontaine | 2005-09-27 | $10,226,000 |