Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7710539 | Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device | Frederik Eduard De Jong | 2010-05-04 |
| 7595496 | Optimized correction of wafer thermal deformations in a lithographic process | Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema | 2009-09-29 |
| 7462430 | Method and arrangement for predicting thermally-induced deformation of a substrate, and a semiconductor device | Frederik Eduard De Jong | 2008-12-09 |
| 7462429 | Method and arrangement for correcting thermally-induced field deformations of a lithographically exposed substrate | Frederik Eduard De Jong | 2008-12-09 |
| 7453063 | Calibration substrate and method for calibrating a lithographic apparatus | Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman | 2008-11-18 |
| 7426011 | Method of calibrating a lithographic apparatus and device manufacturing method | Koen Jacobus Johannes Maria Zaal, Antonius Johannes De Kort, Frederik Eduard De Jong, Koen Goorman, Hermen Folken Pen | 2008-09-16 |
| 7423725 | Lithographic method | Koen Jacobus Johannes Maria Zaal, Antonius Johannes De Kort, Frederik Eduard De Jong, Koen Goorman, Hermen Folken Pen | 2008-09-09 |
| 7304715 | Lithographic apparatus and device manufacturing method | Theodorus Petrus Maria Cadee, Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederick Eduard De Jong, Koen Goorman +6 more | 2007-12-04 |
| 7250237 | Optimized correction of wafer thermal deformations in a lithographic process | Joost Jeroen Ottens, Harmen Klaas Van Der Schoot, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema | 2007-07-31 |
| 7196768 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Jeroen Johannes Sophia Maria Mertens, Frederik Eduard De Jong, Koen Goorman, Edwin Augustinus Matheus Van Gompel | 2007-03-27 |