Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508906 | Method of measuring a parameter and apparatus | Arie Jeffrey Den Boef | 2019-12-17 |
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Alessandro Polo, Duygu Akbulut, Sebastianus Adrianus GOORDEN, Arie Jeffrey Den Boef | 2019-06-11 |