| 8553205 |
Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus |
Stephen Roux, Ross Ian Mackenzie |
2013-10-08 |
| 7500380 |
Measuring distance using gas gauge proximity sensor |
Peter Kochersperger |
2009-03-10 |
| 7372548 |
Levitated reticle-masking blade stage |
Daniel N. Galburt, Stephen Roux |
2008-05-13 |
| 7359037 |
Drive for reticle-masking blade stage |
Daniel N. Galburt, Stephen Roux |
2008-04-15 |
| 7021120 |
High resolution gas gauge proximity sensor |
Peter Kochersperger |
2006-04-04 |
| 6950175 |
System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism |
Daniel N. Galburt, Stephen Roux |
2005-09-27 |
| 6906789 |
Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion |
Daniel N. Galburt, Stephen Roux |
2005-06-14 |