Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7135693 | Method and apparatus for recycling gases used in a lithography tool | — | 2006-11-14 |
| 7119883 | Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light | Erik Roelof Loopstra, Michael L. Nelson | 2006-10-10 |
| 7105836 | Method and apparatus for cooling a reticle during lithographic exposure | Santiago del Puerto, Daniel N. Galburt, Andrew W. McCullough, Joost Jeroen Ottens | 2006-09-12 |
| 7087911 | Method for recycling gases used in a lithography tool | — | 2006-08-08 |
| 7016051 | Reticle focus measurement system using multiple interferometric beams | Todd Bednarek | 2006-03-21 |
| 6984474 | Reticle barrier system for extreme ultra-violet lithography | Richard Lenox | 2006-01-10 |
| 6950175 | System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism | Daniel N. Galburt, Frederick Carter | 2005-09-27 |
| 6934005 | Reticle focus measurement method using multiple interferometric beams | Todd Bednarek | 2005-08-23 |
| 6927842 | Wafer handling method for use in lithography patterning | Santiago del Puerto, Justin Kreuzer | 2005-08-09 |
| 6919573 | Method and apparatus for recycling gases used in a lithography tool | — | 2005-07-19 |
| 6906789 | Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion | Frederick Carter, Daniel N. Galburt | 2005-06-14 |
| 6894293 | System for recycling gases used in a lithography tool | — | 2005-05-17 |
| 6850330 | Reticle focus measurement system using multiple interferometric beams | Todd Bednarek | 2005-02-01 |
| 6778258 | Wafer handling system for use in lithography patterning | Santiago del Puerto, Justin Kreuzer | 2004-08-17 |
| 6770895 | Method and apparatus for isolating light source gas from main chamber gas in a lithography tool | — | 2004-08-03 |
| 6332569 | Etched glass solder bump transfer for flip chip integrated circuit devices | Steven A. Cordes, Peter A. Gruber, Egon Max Kummer, Carlos J. Sambucetti, James L. Speidell | 2001-12-25 |
| 6239863 | Removable cover for protecting a reticle, system including and method of using the same | Eric Brian Catey, David A. Hult, Santiago del Puerto | 2001-05-29 |
| 6149122 | Method for building interconnect structures by injection molded solder and structures built | Daniel G. Berger, Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Rajesh Shankerlal Patel +2 more | 2000-11-21 |
| 6133633 | Method for building interconnect structures by injection molded solder and structures built | Daniel G. Berger, Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Rajesh Shankerlal Patel +2 more | 2000-10-17 |
| 6105852 | Etched glass solder bump transfer for flip chip integrated circuit devices | Steven A. Cordes, Peter A. Gruber, Egon Max Kummer, Carlos J. Sambucetti, James L. Speidell | 2000-08-22 |
| 5775569 | Method for building interconnect structures by injection molded solder and structures built | Daniel G. Berger, Guy Paul Brouillette, David Danovitch, Peter A. Gruber, Rajesh Shankerlal Patel +2 more | 1998-07-07 |