Issued Patents All Time
Showing 51–75 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482967 | Lithographic apparatus, control system and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk, Nicolas Lallemant | 2016-11-01 |
| 9436099 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Johannes Anna Quaedackers, Christine Corinne Mattheus | 2016-09-06 |
| 9316919 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2016-04-19 |
| 9280065 | Inspection apparatus to detect a target located within a pattern for lithography | — | 2016-03-08 |
| 9255892 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar, Hendrik Jan Hidde Smilde | 2016-02-09 |
| 9229338 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Maurits Van Der Schaar, Hendrik Jan Hidde Smilde | 2016-01-05 |
| 9217916 | Lithographic apparatus and device manufacturing method | Paul Christiaan Hinnen, Reiner Maria Jungblut, Koenraad Remi André Maria Schreel | 2015-12-22 |
| 9201310 | Method of measuring overlay error and a device manufacturing method | Leonardus Henricus Marie Verstappen | 2015-12-01 |
| 9182678 | Lithographic apparatus and device manufacturing method | Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas, Franciscus Johannes Joseph Janssen | 2015-11-10 |
| 9170498 | Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor | Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Michel François Hubert Klaassen, Martijn Gerard Dominique Wehrens, Haico Victor Kok +2 more | 2015-10-27 |
| 9152058 | Lithographic apparatus and device manufacturing method involving a member and a fluid opening | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2015-10-06 |
| 9081299 | Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2015-07-14 |
| 8988658 | Inspection apparatus to detect a target located within a pattern for lithography | — | 2015-03-24 |
| 8988653 | Lithographic apparatus, distortion determining method, and patterning device | Robertus Cornelis Martinus De Kruif | 2015-03-24 |
| 8982347 | Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus | Xiuhong Wei, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons +4 more | 2015-03-17 |
| 8982329 | Method and apparatus for measuring line end shortening, substrate and patterning device | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Richard Johannes Franciscus Van Haren | 2015-03-17 |
| 8947637 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2015-02-03 |
| 8947632 | Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate | Frank Staals | 2015-02-03 |
| 8896817 | Lithographic projection apparatus, device manufacturing methods and mask with sensor and diffuser for use in a device manufacturing method | Bearrach Moest | 2014-11-25 |
| 8891061 | Lithographic focus and dose measurement using a 2-D target | Christian Marinus Leewis, Hugo Augustinus Joseph Cramer, Johannes Anna Quaedackers, Christine Corinne Mattheus | 2014-11-18 |
| 8860928 | Lithographic apparatus, computer program product and device manufacturing method | Sytse Postma, Bearrach Moest, Vasco Miguel Matias Serrao | 2014-10-14 |
| 8848195 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrate | Christian Marinus Leewis, Karel Diederick Van Der Mast, Peter Clement Paul Vanoppen, Ruben Alvarez Sanchez | 2014-09-30 |
| 8830472 | Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Henricus Petrus Maria Pellemans, Martin Ebert | 2014-09-09 |
| 8823919 | Lithographic apparatus, removable member and device manufacturing method | Nina Vladimirovna Dziomkina, Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij +4 more | 2014-09-02 |
| 8786825 | Apparatus and method of measuring a property of a substrate | Maurits Van Der Schaar, Andreas Fuchs, Martyn John Coogans | 2014-07-22 |