Issued Patents All Time
Showing 76–100 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8773637 | Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark | Willem Jurrianus Venema, Bearrach Moest, Vasco Miguel Matias Serrao, Cedran Bomhof | 2014-07-08 |
| 8724087 | Inspection apparatus for lithography | Antoine Gaston Marie Kiers, Maurits Van Der Schaar, Leonardus Henricus Marie Verstappen, Scott Anderson Middlebrooks, Andreas Fuchs | 2014-05-13 |
| 8659741 | Lithographic apparatus, removable member and device manufacturing method | Roelof Frederik De Graaf, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Gerardus Martinus Antonius De Rooij, Martijn Houben +4 more | 2014-02-25 |
| 8629418 | Lithographic apparatus and sensor therefor | Haico Victor Kok, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more | 2014-01-14 |
| 8547522 | Dedicated metrology stage for lithography applications | Harald Petrus Cornelis Vos | 2013-10-01 |
| 8482718 | Lithographic apparatus and device manufacturing method | Wilhelmus Maria Corbeij, Haico Victor Kok | 2013-07-09 |
| 8482845 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2013-07-09 |
| 8462314 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Siebe Landheer, Wouterus Johannes Petrus Maria Maas, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas +2 more | 2013-06-11 |
| 8436984 | Lithographic apparatus and method of irradiating at least two target portions | Cornelis Lambertus Maria Van Weert, Bearrach Moest | 2013-05-07 |
| 8263296 | Lithographic apparatus and device manufacturing method | Paul Christiaan Hinnen, Reiner Maria Jungblut, Koenraad Remi André Maria Schreel | 2012-09-11 |
| 8233134 | Lithographic apparatus and device manufacturing method | Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Franciscus Johannes Joseph Janssen, Ivo Adam Johannes Thomas | 2012-07-31 |
| 8068212 | Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elements | M'hamed Akhssay, Mamoun El Ouasdad, Asis Uasghiri | 2011-11-29 |
| 8049864 | Device manufacturing method and lithographic apparatus | Haico Victor Kok, Johannes Jacobus Matheus Baselmans | 2011-11-01 |
| 8045134 | Lithographic apparatus, control system and device manufacturing method | Johannes Henricus Wilhelmus Jacobs, Tammo Uitterdijk, Nicolas Lallemant | 2011-10-25 |
| 8035798 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2011-10-11 |
| 7907255 | Lithographic apparatus and device manufacturing method | Timotheus Franciscus Sengers, Mark Kroon, Kees Van Weert | 2011-03-15 |
| 7889315 | Lithographic apparatus, lens interferometer and device manufacturing method | — | 2011-02-15 |
| 7829249 | Device manufacturing method, computer program and lithographic apparatus | M'hamed Akhssay, Mamoun El Ouasdad, Asis Uasghiri | 2010-11-09 |
| 7619747 | Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device | Timotheus Franciscus Sengers | 2009-11-17 |
| 7518703 | Lithographic apparatus and method | Ivo Adam Johannes Thomas | 2009-04-14 |
| 7459669 | Sensor and lithographic apparatus | Rob Adrianus Antonius Maria Bastiaensen, Marcel Maurice Hemerik, Jeroen Johannes Sophia Maria Mertens, Jacob Sonneveld | 2008-12-02 |
| 7443485 | Apodization measurement for lithographic apparatus | Haico Victor Kok | 2008-10-28 |
| 7375799 | Lithographic apparatus | Wilhelmus Petrus De Boeij, Hendrikus Robertus Marie Van Greevenbroek, Michel Fransois Hubert Klaassen, Martijn Gerard Dominique Wehrens, Tammo Uitterdijk | 2008-05-20 |
| 7315353 | Apodization measurement for lithographic apparatus | Haico Victor Kok | 2008-01-01 |
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |