Issued Patents All Time
Showing 101–102 of 102 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7145630 | Lithographic apparatus and device manufacturing method | Bearrach Moest, Marc Antonius Maria Haast | 2006-12-05 |
| 6650399 | Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations | Johannes Jacobus Matheus Baselmans, Marco Hugo Petrus Moers, Hans Van Der Laan, Robert Wilhelm Willekers, Wilhelmus Petrus De Boeij | 2003-11-18 |